Gas injector and apparatus including the same

ABSTRACT

A gas injector includes: a plate including at least one first injection hole; and at least one nozzle module combined with the plate, the at least one nozzle module including at least one second injection hole connected to the at least one first injection hole.

CROSS REFERENCE TO RELATED APPLICATION

This application is a Divisional Application of U.S. application Ser.No. 11/395,643, filed Mar. 31, 2006, which claims the priority of KoreanPatent Application No. 2005-0027474 filed in Korea on Apr. 1, 2005, inthe Korean Intellectual Property Office, the disclosure of which isincorporated herein in its entirety by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to an apparatus for a display device, andmore particularly, to an apparatus including a gas injector where anozzle module is detachable.

2. Discussion of the Related Art

Flat panel display (FPD) devices having portability and low powerconsumption have been a subject of increasing research in the presentinformation age. Among the various types of FPD devices, liquid crystaldisplay (LCD) devices are commonly used in notebook and desktopcomputers because of their high resolution, capability of displayingcolored images, and high quality image display.

In general, an LCD device includes a first substrate, a second substrateand a liquid crystal layer between the first and second substrates. Thefirst substrate and the second substrate may be referred to as an arraysubstrate and a color filter substrate, respectively. A gate line, adata line, a thin film transistor (TFT) and a pixel electrode are formedon the first substrate, and a color filter layer and a common electrodeare formed on the second substrate. The gate line crosses the data lineto define a pixel region, and the TFT is connected to the gate line andthe data line. In addition, the pixel electrode connected to the TFT isformed in the pixel region.

A semiconductor device or an LCD device is fabricated by repetition of adeposition step of forming a thin film on a wafer or a glass substrate,a photolithographic step of exposing some portions of the thin filmusing a photosensitive material, a patterning step of removing theexposed thin film and a cleaning step of eliminating a residualmaterial. Each step of the fabrication process is performed in a chamberof an apparatus under an optimum condition for each step.

FIG. 1 is a schematic cross-sectional view showing a plasma apparatusfor a semiconductor device or a display device according to the relatedart. In FIG. 1, the plasma apparatus includes a chamber 10 defining areaction space, a susceptor 20 having a substrate 30 thereon, a gasinjector 40 over the susceptor 20 and a gas supply tube 80. The gasinjector 40, which may be referred to as a shower head or a gasdistributor, includes a plurality of injection holes 42 to distributegases toward the susceptor 20. An upper plate 50 is disposed over thegas injector 40 and functions as a plasma electrode to apply a radiofrequency (RF) power to reaction gases. The upper plate 50 is connectedto an RF power supply 60, and an impedance matching box (IMB) 70 isconnected between the upper plate 50 and the RF power supply 60 tomaximize the RF power. The susceptor 20 is grounded to function as anopposite electrode to the plasma electrode. The RF power may be appliedto the susceptor 20. An edge portion of the gas injector 40 is fixed tothe upper plate 50 to define a buffer space 52. Reaction gases aresupplied to the buffer space 52 through the gas supply tube 80 from anexterior gas tank (not shown) and then are primarily diffused in thebuffer space 52. Accordingly, the reaction gases are uniformly injectedinto the chamber 10.

FIG. 2 is a schematic perspective view showing a gas injector of aplasma apparatus for a semiconductor device or a display deviceaccording to the related art. In FIG. 2, the gas injector 40 includes aplurality of injection holes 42. The gas injector 40 may be formed ofaluminum (Al) and may have a size larger than a substrate. Since onlythe edge portion of the gas injector 40 is fixed to the chamber 10 (ofFIG. 1) or the upper plate 50 (of FIG. 1), a central portion of the gasinjector 40 sages under the weight. The sag of the central portioncauses non-uniformity in gas distribution between the edge portion andthe central portion. As the size of the gas injector 40 increases, thesag in the gas injector 40 increases. To prevent the sag in the gasinjector 40, the gas injector 40 may be formed to have an increasedthickness “t.” For example, the gas injector 40 may have a thickness ofabout 30 mm to about 35 mm in a plasma apparatus for a 1500 mm×1850 mmsubstrate, while the gas injector 40 may have a thickness of about 50 mmin a plasma apparatus for a 1950 mm×2250 mm substrate.

In addition, since the plurality of injection holes 42 are formed tohave a density of about 11000 ea/m2, the injection holes 42 of about35000 ea may be formed in the gas injector 40 of a plasma apparatus fora 1500 mm×1850 mm substrate and the injection holes 42 of about 50000 eamay be formed in the gas injector 40 of a plasma apparatus for a 1950mm×2250 mm substrate. Further, the injection holes 42 over about 60000ea may be formed in the gas injector 40 of a plasma apparatus for a 2200mm×2550 mm substrate.

FIGS. 3A and 3B are schematic cross-sectional views showing an injectionhole of a gas injector according to the related art. In FIG. 3A, theinjection hole 42 includes a gas inlet portion 42 a, a nozzle portion 42b, a first diffusing portion 42 c and a second diffusing portion 42 dhaving different shapes and different diameters from one another. InFIG. 3B, the injection hole 42 includes a nozzle portion 42 b, a firstdiffusing portion 42 c and a second diffusing portion 42 d havingdifferent shapes and different diameters from one another without a gasinlet portion 42 a.

The nozzle portion 42 b may have a diameter of about 0.4 mm to about 0.8mm, and the gas inlet portion 42 a and the first diffusing portion 42 cmay have a diameter over about 3 mm. Through the nozzle portion 42 bhaving a finite diameter, the reaction gases are uniformly diffused inthe buffer space 52 (of FIG. 1) and are uniformly injected into thechamber 10 (of FIG. 1) by increasing a pressure of the reaction gases inan upper portion of the injection hole 42. Accordingly, as a diameter ofthe nozzle portion 42 b decreases, the reaction gases are injected moreuniformly.

To obtain the injection hole 42 of FIGS. 3A and 3B, after the nozzleportion 42 b is formed in the gas injector 40 (of FIG. 1), the gas inletportion 42 a and the first diffusing portion 42 c are sequentiallyformed at upper and lower portions of the nozzle portion 42 b. However,it requires high manufacturing technology to form the nozzle portions 42b over 50000 ea each having a diameter of about 0.4 mm in an aluminum(Al) plate having a thickness of about 50 mm. In addition, when a singlenozzle portion 42 b is inferiorly formed during the manufacture of theinjection holes 42, the gas injector 40 (of FIG. 1) having the inferiornozzle portion 42 b cannot be used for a plasma apparatus requiring highaccuracy and high uniformity. Accordingly, the gas injector 40 (ofFIG. 1) having the inferior nozzle portion 42 b should be disused.Accordingly, fabrication cost for the gas injector increases andproduction period for the gas injector is elongated.

SUMMARY OF THE INVENTION

Accordingly, the present invention is directed to an apparatus includinga gas injector that substantially obviates one or more of the problemsdue to limitations and disadvantages of the related art.

An object of the present invention is to provide a gas injector havingdecreased fabrication cost and shortened production period.

Another object of the present invention is to provide a gas injectorhaving a detachable nozzle module.

Additional features and advantages of the invention will be set forth inthe description which follows, and in part will be apparent from thedescription, or may be learned by practice of the invention. Theobjectives and other advantages of the invention will be realized andattained by the structure particularly pointed out in the writtendescription and claims hereof as well as the appended drawings.

To achieve these and other advantages and in accordance with the purposeof the present invention, as embodied and broadly described, a gasinjector includes: a plate including at least one first injection hole;and at least one nozzle module combined with the plate, the at least onenozzle module including at least one second injection hole connected tothe at least one first injection hole.

In another aspect, an apparatus for a display device includes: achamber; a susceptor in the chamber; and a gas injector over thesusceptor, the gas injector comprising: a plate including at least onefirst injection hole; and at least one nozzle module combined with theplate, the at least one nozzle module including at least one secondinjection hole connected to the at least one first injection hole.

It is to be understood that both the foregoing general description andthe following detailed description are exemplary and explanatory and areintended to provide further explanation of the invention as claimed.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are included to provide a furtherunderstanding of the invention and are incorporated in and constitute apart of this specification, illustrate embodiments of the invention andtogether with the description serve to explain the principles of theinvention. In the drawings:

FIG. 1 is a schematic cross-sectional view showing a plasma apparatusfor a semiconductor device or a display device according to the relatedart;

FIG. 2 is a schematic perspective view showing a gas injector of aplasma apparatus for a semiconductor device or a display deviceaccording to the related art;

FIGS. 3A and 3B are schematic cross-sectional views showing an injectionhole of a gas injector according to the related art;

FIG. 4 is a schematic cross-sectional view showing a gas injector of aplasma apparatus according to a first embodiment of the presentinvention;

FIG. 5 is a schematic perspective view showing a gas injector of aplasma apparatus according to a first embodiment of the presentinvention;

FIG. 6 is a schematic cross-sectional view showing a gas injector of aplasma apparatus according to a second embodiment of the presentinvention;

FIG. 7 is a schematic perspective view showing a gas injector of aplasma apparatus according to a second embodiment of the presentinvention;

FIG. 8 is a schematic cross-sectional view showing a gas injector of aplasma apparatus according to a third embodiment of the presentinvention;

FIG. 9 is a schematic perspective view showing a gas injector of aplasma apparatus according to a third embodiment of the presentinvention;

FIG. 10 is a schematic perspective view showing a gas injector of aplasma apparatus according to a fourth embodiment of the presentinvention;

FIG. 11 is a schematic cross-sectional view showing a gas injector of aplasma apparatus according to a fifth embodiment of the presentinvention;

FIG. 12 is a schematic cross-sectional view showing a gas injector of aplasma apparatus according to a sixth embodiment of the presentinvention; and

FIG. 13 is a schematic perspective view showing a gas injector of aplasma apparatus according to a sixth embodiment of the presentinvention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Reference will now be made in detail to the preferred embodiments,examples of which are illustrated in the accompanying drawings.

Since the present invention relates to a plasma apparatus such as aplasma enhanced chemical vapor deposition (PECVD) apparatus and anetcher where process gases are excited to a plasma state in a chamberand contact a substrate, the plasma apparatus may be a fabricationapparatus for a liquid crystal display (LCD) device or a semiconductordevice. In addition, the substrate may be a glass substrate for an LCDdevice or a wafer for a semiconductor device. Although a plasmaapparatus is not shown in figures, a plasma apparatus includes achamber, a susceptor in the chamber and a gas injector over thesusceptor. A substrate is disposed on the susceptor and reaction gasesof an exterior gas supply are injected into the chamber. The reactiongases are distributed onto the substrate through the gas injector.

FIGS. 4 and 5 are a schematic cross-sectional view and a schematicperspective view, respectively, showing a gas injector of a plasmaapparatus according to a first embodiment of the present invention.

In FIGS. 4 and 5, a gas injector 100 includes a plate 110 and aplurality of nozzle modules 162. Even though not shown in FIGS. 4 and 5,the plate functions as a lower plate in a plasma apparatus including anupper plate functioning as a plasma electrode for a radio frequency (RF)power. The plate 110 includes a plurality of first injection holes 112and a plurality of openings 116 corresponding to the plurality of firstinjection holes 112. Each opening 116 is formed on the correspondingfirst injection hole 112, and each nozzle module 162 can be attached toand detached from the plate 110. Accordingly, each nozzle module 162 isdetachable with respect to the plate 110. Each opening 116 is formed inthe plate 110 as a concave portion to have a diameter greater than adiameter of each first injection hole 112.

For example, each first injection hole 112 may have a diameter of about2 mm to about 10 mm. As shown in FIG. 4, each first injection hole 112may have a cylindrical hollow shape with a tapering bottom portion.Alternately, each first injection hole 112 may have a tapering hollowshape such that a diameter gradually increases with a distance from atop portion as shown in FIG. 6.

The nozzle module 160 can be inserted into the opening 116. The nozzlemodule 160 may have a cylinder shape including a second injection hole162 at a central portion of the cylinder shape. The second injectionhole 162 is connected to the first injection hole 112 when the nozzlemodule 160 is inserted into the opening 116. As shown in FIG. 4, thesecond injection hole 162 may have a cylindrical hollow shape.Alternately, the second injection hole 162 may have a sandglass hollowshape including a gas inlet portion 162 a, a nozzle portion 162 b and adiffusing portion 162 c as shown in FIG. 6. The gas inlet portion 162 a,the nozzle portion 162 b and the diffusing portion 162 c may havedifferent diameters form one another. The minimum diameter of the secondinjection hole 162 may be within a range of about 0.1 mm to about 1 mmregardless of the shape of the second injection hole 162. In addition,the nozzle module 160 may various shapes in accordance with the shape ofthe opening 116. For example, when the opening 116 has a polygon shape,the nozzle module 160 may have a polygon shape.

The nozzle module 160 and the opening 116 closely adhere to each otherto prevent leakage of reaction gases when attached. For closer adhesion,screw holes may be further formed on an outer surface of the nozzlemodule 160 and an inner surface of the opening 116 so that the nozzlemodule 160 and the opening 116 can be combined using a screw. Inaddition, a fixing means may be formed on an inner surface of theopening 116 so that the nozzle module 160 can be fixed to the openingthrough the fixing means.

Since the nozzle module 160 having the finite second injection hole 162is detachable, only the first injection hole 112 and the opening 116having a diameter greater than a diameter of the second injection hole162 are formed in the plate 110 of aluminum (Al). Accordingly,fabrication inferiority and production period are improved. Even thoughthe nozzle module 160 is formed of aluminum (Al), the nozzle module 160may be fabricated using a mass production system because formation of afinite injection hole in a nozzle module thinner than a plate has lowerinferiority. In fabrication of a gas injector according to the relatedart, when the plate of aluminum (Al) is judged to have an inferiornozzle portion, the corresponding plate is disused. In fabrication of agas injector according to the present invention, even when the nozzlemodule of aluminum (Al) is judged to have an inferior second injectionhole, the corresponding nozzle module is eliminated and the plate can beused. In addition, since the nozzle module 160 and the plate 110 can besimultaneously fabricated, production period for a gas injector isshortened and fabrication cost is reduced. Furthermore, since the nozzlemodule 160 is individually combined with the plate 110, injectiondirection or injection speed of reaction gases can be locally controlledby varying a diameter and a direction of the second injection hole 162.

FIGS. 6 and 7 are a schematic cross-sectional view and a schematicperspective view, respectively, showing a gas injector of a plasmaapparatus according to a second embodiment of the present invention.

In FIGS. 6 and 7, a gas injector 100 includes a plate 110 and aplurality of nozzle modules 162. Each first injection hole 112 of theplate 110 may have a tapering hollow shape such that a diametergradually increases with a distance from a top portion, and a secondinjection hole 162 of the nozzle module 160 may have a sandglass hollowshape including a gas inlet portion 162 a, a nozzle portion 162 b and adiffusing portion 162 c. As a result, a thickness of the nozzle module160 of the second embodiment may increase as compared with the nozzlemodule 160 of the first embodiment.

FIGS. 8 and 9 are a schematic cross-sectional view and a schematicperspective view, respectively, showing a gas injector of a plasmaapparatus according to a third embodiment of the present invention.

In FIGS. 8 and 9, a gas injector 100 includes a plate 110 and aplurality of nozzle modules 160. The plate 110 includes a plurality offirst injection holes 112 and a plurality of openings 116. The nozzlemodule 160 includes a plurality of second injection holes 162 and can beinserted into the opening 116. Here, a single opening 116 corresponds toa plurality of first injection holes 112 instead of a single firstinjection hole. For example, when the nozzle module 160 is inserted intothe opening 116 corresponding to nine first injection holes 112, thenozzle module 160 may include nine second injection holes 162 eachcorresponding to the single first injection hole 112. As a result, asingle opening 116 may correspond to nine first injection holes 112 andnine second injection holes 162. In another embodiment, the singleopening may correspond to a different number of first injection holesand a different number of second injection holes.

The nozzle module 160 may have a tetragonal pillar shape such as arectangular pillar or a square pillar. In addition, an O-ring is furtherformed between the opening 116 and the nozzle module 160 to preventleakage of reaction gases. When an O-ring is formed, the nozzle module160 may be formed to be separated from an inner bottom surface of theopening 116 using the O-ring in a groove of the inner bottom surface ofthe opening 116.

FIG. 10 is a schematic perspective view showing a gas injector of aplasma apparatus according to a fourth embodiment of the presentinvention.

In FIG. 10, a single opening 116 of a plate 110 corresponds to aplurality of first injection holes 112 in the plate 110 and a pluralityof second injection holes 162. However, a single nozzle module 160includes the single second injection hole 162 instead of the pluralityof second injection holes as in FIGS. 8 and 9. Accordingly, the nozzlemodules 160 having the same number as the first injection holes 112 areinserted into the single opening 116. Here, the first injection hole 112and the second injection hole 162 are connected to each other withaccurate alignment so that reaction gases can be injected though thesecond injection hole 162 and the first injection hole 112.

FIG. 11 is a schematic cross-sectional view showing a gas injector of aplasma apparatus according to a fifth embodiment of the presentinvention.

In FIG. 11, a single opening 116 of a plate 110 corresponds to aplurality of first injection holes 112 in the plate 110 and a pluralityof second injection holes 162, and a single nozzle module 160 includesthe plurality of second injection holes 162. The first injection hole112 has a tapering hollow shape such that a diameter gradually increaseswith a distance from a top portion. The second injection hole 162 has asandglass hollow shape including a gas inlet portion 162 a, a nozzleportion 162 b and a diffusing portion 162 c.

FIGS. 12 and 13 are a schematic cross-sectional view and a schematicperspective view, respectively, showing a gas injector of a plasmaapparatus according to a sixth embodiment of the present invention.

In FIGS. 12 and 13, a gas injector 100 includes a plate 110 and aplurality of nozzle modules 160. The plate 110 includes a plurality offirst injection holes 112 without openings, and each first injectionhole 112 is formed to have a sufficient diameter to include the nozzlemodule 160. Accordingly, the nozzle module 160 is directly inserted intothe first injection hole 112. The nozzle module 160 and the firstinjection hole 112 may be combined with each other using a screw toprevent leakage of reaction gases. Moreover, an O-ring may be formedbetween the first injection hole 112 and the nozzle module 160. Thenozzle module 160 includes a second injection hole 162 having asandglass hollow shape including a gas inlet portion 162 a, a nozzleportion 162 b and a diffusing portion 162 c. Alternately, the singlenozzle module 160 may include a plurality of second injection holes 162when the first injection hole 112 is formed to include the single nozzlemodule 160. In addition, the second injection hole 162 may have acylindrical hollow shape. Even though the plate 110 has the samethickness as the nozzle module 160 in FIGS. 12 and 13, the plate 110 andthe nozzle module 160 may have different thicknesses from each other inanother embodiment.

Consequently, a gas injector according to the present invention includesa detachable nozzle module. As a result, fabrication cost for a gasinjector is reduced and production period is shortened. In addition,concentration, direction and speed of reaction gases are locallycontrolled and by varying a diameter and a direction of an injectionhole in the detachable nozzle module.

It will be apparent to those skilled in the art that variousmodifications and variations can be made in the plasma apparatus havinga gas injector without departing from the spirit or scope of theinvention. Thus, it is intended that the present invention covers themodifications and variations of this invention provided they come withinthe scope of the appended claims and their equivalents.

1. A gas injector, comprising: a plate including an upper portion havinga plurality of openings and a lower portion having a plurality of firstinjection holes corresponding to respective ones of the plurality ofopenings to inject a gas from a lower surface of the plate to a reactionspace; and a plurality of nozzle modules combined with correspondingones of the plurality of openings, the plurality of nozzle modulesincluding a plurality of second injection holes in communication withcorresponding ones of the plurality of first injection holescorresponding to respective ones of the plurality of openings to form agas path therethrough.
 2. The gas injector according to claim 1, furthercomprising a wall for defining the plurality of openings.
 3. The gasinjector according to claim 2, wherein the wall is formed at the upperportion between the plurality of first injection holes.
 4. The gasinjector according to claim 2, wherein the top flat surface of each ofthe plurality of nozzle modules is on substantially the same level withan adjacent portion of the wall.
 5. The gas injector according to claim1, wherein the plurality of nozzle modules are attachable to anddetachable from the plurality of openings.
 6. The gas injector accordingto claim 1, wherein the plurality of nozzle modules are inserted intothe plurality of openings, respectively.
 7. The gas injector accordingto claim 1, wherein each of the plurality of nozzle modules has atetragonal pillar shape or a square pillar shape.
 8. The gas injectoraccording to claim 1, wherein each of the plurality of first injectionholes has one of a cylindrical hollow shape and a tapering hollow shape.9. The gas injector according to claim 1, wherein each of the pluralityof second injection holes includes a gas inlet portion, a nozzle portionand a diffusing portion having different diameters from one another. 10.The gas injector according to claim 1, wherein each of the plurality ofsecond injection holes has a minimum diameter within a range of about0.1 mm to about 1 mm.
 11. The gas injector according to claim 1, whereina diameter of each of the plurality of first injection holes is greaterthan a diameter of each of the plurality of second injection holes. 12.The gas injector according to claim 1, further comprising an O-ringbetween each of the plurality of openings and each of the plurality ofnozzle modules.
 13. An apparatus for a display device, comprising: achamber; a susceptor in the chamber; and a gas injector over thesusceptor, the gas injector comprising: a plate including an upperportion having a plurality of openings and a lower portion having aplurality of first injection holes corresponding to respective ones ofthe plurality of openings to inject a gas from a lower surface of theplate to a reaction space; and a plurality of nozzle modules combinedwith corresponding ones of the plurality of openings, the plurality ofnozzle modules including a plurality of second injection holes incommunication with corresponding ones of the plurality of firstinjection holes corresponding to respective ones of the plurality ofopenings to form a gas path therethrough.
 14. The apparatus according toclaim 13, wherein a concentration of reaction gases in the chamber islocally controlled by varying a diameter and a direction of theplurality of second injection holes.
 15. A gas injector, comprising: aplate including an upper portion having a plurality of openings and alower portion having a plurality of first injection holes correspondingto respective ones of the plurality of openings to inject a gas from alower surface of the plate to a reaction space; and a plurality ofnozzle modules combined with the plurality of openings, each of theplurality of nozzle modules including at least one second injection holeconnected to a corresponding one of the plurality of first injectionholes to form a gas path therethrough.
 16. The gas injector according toclaim 15, further comprising a wall for defining the plurality ofopenings.
 17. The gas injector according to claim 16, wherein the wallis formed at the upper portion between the plurality of first injectionholes.
 18. The gas injector according to claim 16, wherein the top flatsurface of each of the plurality of nozzle modules is on substantiallythe same level with an adjacent portion of the wall.
 19. The gasinjector according to claim 15, wherein the plurality of nozzle modulesare attachable to and detachable from each of the plurality of openings.20. The gas injector according to claim 15, wherein the plurality ofnozzle modules are inserted into each of the plurality of openings. 21.The gas injector according to claim 15, wherein the top flat surface ofone of the plurality of nozzle modules is on substantially the samelevel with a region of the upper portion of the plate.
 22. The gasinjector according to claim 15, wherein the number of the plurality offirst injection holes corresponding to each of the plurality of openingsand the number of plurality of nozzle modules combined with each of theplurality of openings are the same.
 23. An apparatus for a displaydevice, comprising: a chamber; a susceptor in the chamber; and a gasinjector over the susceptor, the gas injector comprising: a plateincluding an upper portion having a plurality of openings and a lowerportion having a plurality of first injection holes corresponding torespective ones of the plurality of openings to inject a gas from alower surface of the plate to a reaction space; and a plurality ofnozzle modules combined with the plurality of openings, each of theplurality of nozzle modules including at least one second injection holeconnected to a corresponding one of the plurality of first injectionholes to form a gas path therethrough.